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HomeProducts Heaters Silicone Rubber Heaters Pump and Gas Line Heating Systems

Pump and Gas Line Heating Systems

 
Zesta Watlow Pump and Gas Line Heating Systems
Zesta Watlow Pump and Gas Line Heating Systems
Zesta Watlow Pump and Gas Line Heating Systems
Zesta Watlow Pump and Gas Line Heating Systems
Zesta Watlow Pump and Gas Line Heating Systems
Zesta Watlow Pump and Gas Line Heating Systems
Zesta Watlow Pump and Gas Line Heating Systems
Zesta Watlow Pump and Gas Line Heating Systems
Zesta Watlow Pump and Gas Line Heating Systems
Zesta Watlow Pump and Gas Line Heating Systems
From gas cabinet to scrubber, Watlow’s standard gas and pump line heating systems combine thermal components that optimize chemical vapor deposition (CVD) and metal etch process performance. With unsurpassed system performance and temperature uniformity, Watlow can help reduce condensation and particle buildup, reduce maintenance related downtime and improve process yields.

This complete system is constructed from Watlow’s heaters, sensors and controllers that meet UL®, CE, NEC and SEMI S2-93 safety requirements.When used in conjunction with Watlow’s communications software, the system offers engineers an ideal solution for improving and monitoring system performance.



Watlow Flexible Heater Datasheet (EN)
Watlow: Your Heat Solutions Resource Brochure (EN)

Watlow Elements Souples De Chauffage Fiche Technique (FR)
Watlow: Vos Solutions de Chauffage Brochure (FR)
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Features
Specifications
Ordering information
Resources
Applications

Product Features

  • Easy to install two part system which conveniently fits on most gas line configurations
  • Flexible heater design gives engineers the flexibility to easily customize the thermal profile for each gas line application and allows quick prototyping to determine energy distribution requirements for process improvement
  • Flexible standard system components eliminates unnecessary lead times for custom designs

Heater and jacket material:
reinforced silicone rubber fabric
Color:
  • Insulation and outer jacket: gray
  • Heater: red-orange
Snap type fasteners:
13 mm (0.5 in.) nominal diameter metal construction with nylon cover; maximum operating temperature 200°C (392°F)
Fastening:
Velcro® fasteners available
Voltage:
120 and 208VÅ(ac) standard. Consult factory for other voltages
Power lead wires:
102 mm (4 in.) #18 AWG UL® 1180/CSA Teflon® insulated, rated 10A, lead wire pair encapsulated in reinforced silicone rubber sleeving
Amperage:
Heaters interconnectable up to a 10A circuit
Agency Certification, Recognition Compliance and Approvals:
  • Complies with SEMI S2-93 standards
  • UL® recognized for U.S. and Canadian safety standards
  • CE
  • NEC (National Electrical Code), Article #427-23
  • (Contact factory for specific application and approvals.)

Applications

Gas delivery lines
  • Boron trichloride, BCl3
  • Chlorine trifluoride, ClF3
  • Dichlorosilane, (DCS), SiH2Cl2
  • Tetra ethyl orthosilicate, TEOS
  • Tungsten hexafluoride, WF6
  • Process gas line qualification
Fore line and exhaust lines for CVD and metal etch
  • Low Pressure Chemical Vapor Deposition (LPCVD) — TEOS, Ti Nitride
  • Plasma Enhanced Chemical Vapor Deposition (PECVD) — TEOS, Ti Nitride, Tungsten, Oxynitride
Plasma Etch
  • Aluminum etch
  •  Tungsten etch