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HomeProducts Heaters Circulation Heaters CAST-X Circulation Heaters PUR-X 2000

PUR-X 2000

 
PUR-X 2000
The CAS PUR-X replaceable tube circulation heater provides contamination-free heating of liquids and gases.
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Features
Specifications
Ordering information
Resources
Applications

Product Features

  • Heating elements cast in aluminum
  • Low maintenance
  • Teflon®- coated for easy cleaning
  • High purity heating
  • Fluid path independent of heater sheath
  • Non-welded construction
  • Self-draining
  • Replaceable tubing

Product Specifications

Power:
  • 5 kW Total to 7.9 kW Total
  • Voltage Range: 200 - 480 V
  • Max Line Current: 30 A per circuit
Tubing:
  • .375” OD (3/8”) (9.52 mm)
  • .031” Wall (.80 mm)
  • Overall Process Tube Length: 325" (8255 mm)
  • PFA (PerFluoroAlkoxy) / Teflon® (standard)
  • High Purity PFA (optional upgrade)
Max Pressure:
70 psi (4.82 bar)
Body:
Aluminum with Black Teflon® Protective Coating
Enclosures:
NEMA 7 (explosion-proof)
Max Working Temperature:
392°F (200°C)
Weight:
29 lbs (13.1Kg) (includes housing)
Sensors:
  • K or J Type Thermocouples Standard (Qty. 3)
  • 1 for Process Control
  • 1 for High-Limit Protection
  • 1 for Tube Temperature Protection
Available Accessories:
  • Insulating Jacket
  • Straight Union Fittings

Ordering information

Resources

Applications

  • Semiconductor wet process systems
  • Wafer cleaning equipment (wet bench systems)
  • Heating of photo-resist removal solvents
  • DI water heating for wafer rinsing
  • Air and Nitrogen heating for wafer drying
  • Acid heating