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Home
Products
Heaters
Circulation Heaters
CAST-X Circulation Heaters
PUR-X 1000
PUR-X 1000
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The CAS PUR-X replaceable tube circulation heater provides contamination-free heating of liquids and gases.
Back to CAST-X Circulation Heaters
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Features
Specifications
Ordering information
Resources
Applications
Product Features
Heating elements cast in aluminum
Low maintenance
Teflon®- coated for easy cleaning
High purity heating
Fluid path independent of heater sheath
Non-welded construction
Self-draining
Replaceable tubing
Product Specifications
Power:
1.5 kW Total to 4.5 kW Total
Voltage Range: 120 - 415 V
Max Line Current: 30 A per circuit
Tubing:
.375” OD (3/8”) (9.52 mm)
.031” Wall (.80 mm)
Overall Process Tube Length: 190" (4826 mm)
PFA (PerFluoroAlkoxy) / Teflon® (standard)
High Purity PFA (optional upgrade)
Max Pressure:
70 psi (4.82 bar)
Body:
Aluminum with Black Teflon® Protective Coating
Enclosures:
NEMA 7 (explosion-proof)
Max Working Temperature:
392°F (200°C)
Sensors:
K or J Type Thermocouples Standard (Qty. 3)
1 for Process Control
1 for High-Limit Protection
1 for Tube Temperature Protection
Available Accessories:
Insulating Jacket
Straight Union Fittings
Ordering information
Resources
Applications
Semiconductor wet process systems
Wafer cleaning equipment (wet bench systems)
Heating of photo-resist removal solvents
DI water heating for wafer rinsing
Air and Nitrogen heating for wafer drying
Acid heating